FIB (Focused Ion Beam) - SII (SMI3050)    

위치 : 서울산업대 나노생산기술연구소


- Acceleration Voltage : 1~40 kV
- Resolution : 5 nm
- High resolution top stge : 8 mm x 9 mmt
- Large sample bottom stage : 102 mm x 25 mmt


 

 


    AFM (Atomic Force Microscopy) - Digital Instrument (Dimension 3100)   

위치 : 서울산업대 나노생산기술연구소


- X-Y Scan Rage : 90 μm, Z Range : 6 μm
- Specimen : Sub 150 mm diameter, Sub 12 mm thickness
- Taping/Contact modes



 

 


    SEM (Scanning Electron Microscopy) - Topcon (DS-130)   

위치 : 서울산업대 나노생산기술연구소


- Acceleration Voltage : 1~40 kV
- Resolution : 5 nm
- High resolution top stge : 8 mm x 9 mmt 
- Large sample bottom stage : 102 mm x 25 mmt 


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