Focused Ion Beam    

- Model: IDIM-FIB, Manufactured in Lab
Specification
- Ion source: gallium
- Acceleration voltage: 1 ~30 kV continuosly
- Probe current: 1 pA ~ 50 nA
- Image resolution: 2.5 nm
- Patterning resolution: < 50 nm
- Number of aperture: 13
- 5-axes eucentric stage: 2.5 nm resolution 
- Nano pattern generation system: 6 MHz



    Micro NPDS (Nano Particle Deposition System)    

-Model: Manufactured in Lab
Specification
- Deposition nozzle
   · Nozzle exit diameter : 100~500 mm
   · Stand off Distance (SoD) : 10 mm~10 mm
- Particle feeder
   · particle feeding control : solenoid valve on/off control (PWM),
     response time < 10 ms
                                               · Secondary vacuum pump : 100 l/min
                                                    · Carrier gas pressure : 100~400 kPa
                                                 - Stage motion control
                                                    · 3 axis stepping motorized stage
                                                    · Position accuracy : 1 mm, maximum speed : 5,000 mm/sec
                                                 - in situ Vision system : X 50 optical microscope/CCD camera
                                                 - Patterning resolution : 10 mm


    Mini-NPDS (Nano Particle Deposition System)    

Model: Manufactured in Lab
Specification
- Chamber size: 300 x 300 x 350(mm)
- Outlet pressure: 0.3 Mpa
- SoD range: 3~7(mm)
- Operating condition: Vacuum (-0.095MPa) / atmosphere
- Stage: MMT (X-Y-Z 20 x 20 x 20)(3-D)
- Controller: WSDK
                                             - Vacuum pump: capacity 1000L/min



    Fluidized Bed Aerosol Generator   

- Output Concentration Range: 10 to 100 mg/m3
- Carrier Gas Flowrate Range: 5 to 15 liters/min at 345 KPa (50 psi)
- Particle Size Range: Maximum 40-m aerodynamic diameter
- Cyclone: Stainless steel, 0.5 in. diameter
- Dimensions: 264 × 368 × 150 mm (LWH)

 




    HUMIDITY CHAMBE, DAIHAN-BRAND   

- Output Concentration Range: 10 to 100 mg/m3
- Temp./Humidity Range : -20 to 150 / 30 to 98% RH
- Compressor : 1/2 hp
- Capacity : 155Lit.
- Dim. Outer : w1025*d1035*h1530 mm
- Dim. Inner : w550*d470*h600 mm

 



Copyright(c) 2010 Nano 3D Printing Lab.   ALL RIGHTS RESERVED.
Room 1402, Building 301, School of Mechanical & Aerospace Engineering,
Seoul National University, Daehak-Dong, Gwanak-Ro 599, Gwanak-Gu, Seoul, 151-742, Korea
TEL 82-2-880-9073, 82-2-880-1683, 82-2-886-9074, 82-2-887-9075   FAX 82-2-888-9073